установка php5.3.1 Apache2.2 Ошибки при установки php, не запускается Apache

[zvezda_t]

error.log:

[Thu Feb 04 12:54:30 2010] [notice] Apache/2.2.14 (Win32) PHP/5.3.1 configured -- resuming normal operations
[Thu Feb 04 12:54:30 2010] [notice] Server built: Sep 28 2009 22:41:08
[Thu Feb 04 12:54:30 2010] [notice] Parent: Created child process 1604
[Thu Feb 04 12:54:40 2010] [crit] (OS 6)Неверный дескриптор. : master_main: create child process failed. Exiting.
[Thu Feb 04 12:54:40 2010] [notice] Parent: Forcing termination of child process 36

подпись ошибки, при запуске Apache
szAppName : httpd.exe szAppVer : 2.2.14.0 szModName : php5ts.dll
szModVer : 5.3.1.0 offset : 000e618c

помогите исправить!

[zvezda_t]

теперь такая ошибка:

error.log:

[Thu Feb 04 15:36:08 2010] [warn] pid file C:/server/Apache2.2/logs/httpd.pid overwritten -- Unclean shutdown of previous Apache run?